We for the first time in China carried out experiments on direct etching of monocrystal silicon with focused KrF excimer laser ( λ =248 nm) beam as shown in Fig.
采用非稳腔的聚焦准分子激光 ( Kr F,λ=2 4 8nm)对单晶硅材料进行直接刻蚀 ,从微结构刻蚀的形状尺寸及加工过程的热效应等方面研究了准分子激光直接刻蚀单晶硅的加工特性。
Based on the laser ablation mechanism, the effect of vapor pressure and thermal conduction on the quality of pattern etching in direct etching with an excimer laser is analyzed.
在激光剥离机制的基础上，分析了激光直接刻蚀过程中，蒸气压及热传导对图形刻蚀质量的影响，并得出了刻蚀不同厚度Ａｌ膜的激光能量密度、脉冲频率和刻蚀脉冲数的最佳组合。
The authors base on the artificial simulation of rainfall device,and compare the differences of vertical erosion between soil and sand of Dahongshan mineral district,and analyze the main affect factors of vertical erosion.
凭借人工模拟降雨装置,对大红山工矿区弃石场的土壤与沙砾间的横向与纵向的垂直侵蚀状况比较,分析了影响垂直侵蚀的主要因素。
As different composition of soil mineral and mechnical,rainfall has an different vertial erosion on three kinds of soil,and the release amount namely vertical erosion loss amout between 30 and 120 g/m3 of the soil is farmland soil column>floodplain soil column>loess soil column.
降雨作为影响水土流失的主要因子,对表层土壤垂直侵蚀的影响没有得到应有的重视。
Effect of DC etching aluminum current collector on the performance of LiCoO_2 cathode;
直流刻蚀铝集流体对LiCoO_2正极性能的影响
Effect of DC etching of Al current collector on supercapacitors performance;
集流体表面直流刻蚀对超级电容器性能的影响
CO2 laser direct-writing ablation micromachining technique is used to fabricate the microchannel on the polymethyl methacrylate (PMMA) substrate.
采用CO2激光直写烧蚀加工技术在聚甲基丙烯酸甲酯(PMMA)基片表面加工微通道,分析了CO2激光输出功率和激光束移动速度对加工质量的影响。
