According to the voltage and the wave of current in the thin film deposition and the computer simulation,this paper introduces the structure of power and the key technology,approaches the match of power and plasma load in arc ion plating and raises the design requirements of pulsed negative bias power in arc ion plating.
介绍了电源的结构和关键技术 ,并结合薄膜沉积试验中的电压、电流波形和计算机仿真分析 ,探讨了电源和电弧离子镀的等离子体负载间的匹配 ,提出了电弧离子镀脉冲负偏压电源的设计要
This paper investigated on several problems of PBAIP, including its plasma load characteristic, pulsed bias power supply, the matching between pulsed bias power supply and plasma load of arc ion plating (AIP), and the "green" design of pulsed bias power supply.
本论文就其中电弧离子镀的等离子体负载特性、脉冲偏压电源及脉冲偏压电源与电弧离子镀等离子体负载间的匹配、脉冲偏压电源的绿色化设计等问题进行了深入研究。
Investigation on Plasma Load Characteristic and Pulsed Bias Power Supply of Arc Ion Plating
电弧离子镀的等离子体负载特性与脉冲偏压电源研究
Immobilized Ionic Liquid for the Acid Gas Separation;
负载化离子液体用于酸性气体的分离
Design of Gas-puff Load and Experiments Studies on Z-Pinch Plasma;
喷气负载研制及其Z箍缩等离子体实验研究
The Miniaturized Inductively Coupled Plasma Source and Its Characteristics
小型感应耦合等离子体源及其等离子体特性
Preparation and characteristics of catalyst of ionic liquid
负载离子液体催化剂制备及催化性能的研究
Discharge Characteristics Induced By Self-Excited by Radio Frequency During Plasma Ion Implantation of Cylindrical Bore
等离子体离子注入管筒内壁自激射频放电等离子体特性(英文)
A Research on Focus Properties of Annular Electron Beam in Plasmas
等离子体对空心电子束聚束特性研究
Studying on the Electron Charateristic of Argon Plasma in the PECVD System
PECVD系统中Ar等离子体电子特性的研究
Study on the Band Gap Structure for Time-varying Unmagnetized Plasma Photonic Crystals
时变非磁化等离子光子晶体禁带特性
Influence of the Open-circuit Voltage of Source on Plasma arc Characteristic
整流电源空载电压对等离子电弧特性的影响
Some Studies on Negative Refraction and Designed Surface Plasmon in Periodic Structure;
周期性结构中负折射和人造等离子体的研究
Magnetically Separable TiO_2 Photocatalysts Modified by Plasma and Its Characterization
等离子体修饰磁载TiO_2光催化剂性能研究
Investigation on Characteristics of Ablation Plasma Induced by Intense Pulsed Ion Beam;
强脉冲离子束产生的烧蚀等离子体特性的研究
Analysis of Radiation and Scattering Characteristics of Plasma Antenna
等离子体天线的辐射与散射特性分析
Numerical Simulation of the Discharge Characteristics in ACM PDP Cell
对向型等离子体显示板放电特性分析
The Research on the Characteristic of PBAIP Sheath;
PBAIP等离子体鞘层物理特性的应用研究
Investigation of Properties and Expansion Dynamics of Laser Plasma;
激光等离子体特性及膨胀动力学研究
Investigation of the Characteristic of Discharge Cell in Plasma Display Panel;
等离子体显示板放电单元的特性研究
