This software package includes three subsystems: reactor fluid mechanics simulation subsystem, reaction thermodynamic simulation subsystem, deposition kinetics simulation subsystem.
该系统包含反应室气流流体力学模拟、化学反应热力学模拟和沉积过程动力学模拟等 3 个子系统, 它们可以独立运行, 也可以联合运行。
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