The amphiphobic modification on silicone rubber by CF_4 radio frequency capacitively coupled plasma
CF_4射频容性耦合等离子体对硅橡胶表面双疏改性的研究
Capacitively coupled plasma (CCP) driven by dual frequency is currently becoming an important plasma source as a fine etching tool for manufacturing the ultralarge scale integrated (ULSI) circuits.
双频容性耦合等离子体(dual frequency capacitively coupled plasma DF-CCP)是近年来发展起来的一种新型的等离子体源。
Dual-frequency capacitively coupled plasma (DF-CCP) is one of the crucial components for etching in microelectronic manufacturing, and has been widely used in the next generation etching applications due to its simple structure and ability to control the plasma density, the ion energy distributions(IEDs), and the ion angle distributions(IADs) separately.
双频容性耦合等离子体(dual-frequency capacitively coupled plasma DF-CCP)源是半导体工业中重要的刻蚀设备,由于其可以产生大面积均匀的等离子体,通过调节高、低频源的放电参数可以有效地控制等离子体密度与离子能量、角度分布,并且结构简单成本较低,符合工业生产上的要求,双频CCP源被广泛应用在新一代的半导体刻蚀机的生产上。
Simulation of a Radio-frequency Capacitively-coupled Plasma with Fluid/Monte-Carlo Method;
射频电容耦合等离子体的流体动力学/Monte-Carlo混合模型数值模拟
Electromagnetic Wave Propagation in a Nonuniform Atmosphereic Pressure Plasma and an Experimental Study on a Low-pressure Capacitively Coupled Plasma;
电磁波在非均匀大气等离子体中的传播低气压电容耦合等离子体的实验研究
Treatment of Formaldehyde Using High-frequency Capacitively Coupled Plasma;
高频电容耦合等离子体净化甲醛废气的实验研究
capacitively coupled microwave plasma torch
电容耦合微波等离子体焰炬
capacitively coupled high frequency plasma torch
电容耦合高频等离子体焰炬
Design and Investigation of Capacitive Coupling Radio Frequency Glow Discharge Source;
电容耦合射频辉光放电等离子体激发源研制
Fluid Simulation for Charged Particle Transport in Capacitively Coupled Dual Radio-frequency Discharges;
双频容性耦合等离子体鞘层中带电粒子输运的流体力学模拟
inductively coupled plasma atomic emission spectrometry
电感耦合等离子体原子发射光谱法
inductively coupled microwave plasma torch
电感耦合微波等离子体焰炬
inductively-coupled plasma spectrometer
电感耦合等离子体光谱仪
inductively coupled high frequency plasma torch
电感耦合高频等离子体焰炬
inductively coupled plasma quantometer
电感耦合等离子体光量计
inductively coupled plasma mass spectrometry
电感耦合等离子体质谱法
inductively coupled plasma emission spectrometry
电感耦合等离子体发射光谱学
inductively coupled plasma source mass spectrometer
电感耦合等离子体质谱仪
DRIFT IN ICP SYSTEM AND ITS CONTROL
电感耦合等离子体系统的漂移与监控
The Hybrid Simulation of a Dual-frequency Capacitively Coupled Plasma;
双频容性耦合等离子体物理特性的混合模拟
The Fluid Simulation of N_2-O_2 Dual-Frequency Capacitively Coupled Plasma
N_2-O_2双频容性耦合等离子体的流体力学模拟
