Using thick photoresist as mask, combiningreactive ion etching and wet etching, the surface planarization for isolation structure is realized.
为克服目前隔离结构平坦化技术在工艺控制、平坦化质量等方面存在的问题,提出了一种新的隔离结构表面平坦化工艺,即利用稠光刻胶做掩膜,结合反应离子刻蚀技术与湿法腐蚀技术,实现不同厚度隔离结构的平坦化。
The Flatness Technology of Semiconductor Surface and Study of Advanced Bran-New Wet Cleaning Methods;
半导体表面平坦化及新型高性能湿式清洗工艺的研究
A flat, horizontal surface.
平坦的,水平的表面
a flat desk; acres of level farmland; a plane surface.
平坦的课桌；成亩的平坦农田；平坦的表面。
The surface must be completely plane.
这表面必须完全平坦。
Having a flat, smooth surface.
表面平坦的有一个平坦的、光滑的表面的
A flat or level surface.
水平面平坦或水平的表面
"Having a smooth, even, level surface"
具有光滑、平坦且水平表面的
having a sharply uneven surface or outline.
具有尖锐、不平坦的表面或者轮廓。
an irregular fold in an otherwise even surface.
在一个非常平坦的表面上的不规则的折痕。
The surfaces of the lead plates were not hollowed out to cup toothless gums; they were flat.
铅制牙托的表面平坦，缺乏凹槽，无法覆盖牙床。
Because the ocean surface is so smooth, people may think that the ocean bottom is made up of smooth plains.
由于大洋表面很平坦, 人们可能会认为大洋的底部是由平坦的平原构成的。
Older slab-sided type of subway car; the most suitable surface for painting.
资深者侧面平坦的类型地下铁汽车;油漆的最适当的表面。
Nothing in the cellular world is flat. Even the flattest of basement membranes has topography; bumps, if you like, beneath the cellular mattress.
在细胞的世界里，没有什么是平坦的，哪怕最平坦的基底膜也有高低起伏的表面。
coated paper has a smooth polished coating especially suitable for halftone printing; sugar-coated pills.
铜版纸有平坦光滑的表面尤其适于铜版印刷；糖衣药片。
The face structure comprises a flat web of rectangular box sections either welded or bolted together on site.
表皮结构由一种矩形断面的平坦的网状结构焊接或者拼装而成。
It is shown that the epitaxial layers have flat interface of heterojunctions and good crystal quality.
结果表明外延层具有平坦的异质结界面和良好的晶体特性。
Research Progress on High Precision Planarization Technology for Solid Surface
固体表面高精密平面化技术研究进展
Graphic Non-Two Dimentional,The Application of the Visual Elements with the Multi-Dimensional Expression in Exhibition Space Design
平面非平面——论平面视觉要素的多维化表述在展示空间中的应用
