The etching rate and mechanism for quartz and BK7 glass in CF_4/CHF_3 as working gas were investigated as a function of gas composition, gas flowrate and RF bias voltage, and the results showed that the etching rate is in direct proprtion to the mean square root of RF bias voltage.
用CF4/CHF3作为工作气体对石英和BK 7玻璃进行了研究,分析了气体组分、气体流量和射频偏压等几种因素对刻蚀速率的影响,结果表明刻蚀速率与射频偏压的均方根成正比。
In this paper, an investigation of the laser chemical etching of the Nickel-ironalloy(Ni=52%) in sodium nitrate solution by using a relatively low power Argon-ion laser hadbeen made, etching rates had been determined as a function of laser power and solution concent-ration, etching mechanism had been analysed.
利用氩离子激光,在较低的激光功率下,对铁镍合金(Ni=52％)在硝酸钠溶液中的激光化学刻蚀作了研究,给出了刻蚀速率与激光功率和溶液浓度之间的关系曲线,分析了刻蚀的机理。
And the effects of these factors on etching rate and etching results were discussed and analyzed in detail.
实验中可以明显观察到刻蚀过程中的反应限制阶段与扩散限制阶段,说明经过长时间的刻蚀,HF酸的扩散效应将成为影响刻蚀速率的主导因素。
Isotropic chemical reaction etch plays major role in etch rate of Si when cathode temperature from 0℃ to 80℃,but in cryogenic etching(cathode temperatur.
7 Pa、11Pa时,基片温度的改变对其刻蚀速率的影响。
The etch rate and mechanisms were measured and analyzed as a function of ion energy, ion beam density and ion incidence angle.
给出了离子能量、离子束流密度和离子束入射角等因素与刻蚀速率的关系曲线,用最小二乘法拟合了上述因素与刻蚀斜率的函数关系方程;分析了光刻胶和基片在刻蚀过程中随刻蚀深度的变化对图形转移精度的影响,用AFM的Tapping模式测量了刻蚀前后HfO2薄膜表面质量的变化。
The etch rate and selectivity of Si and SiNx have been studied in SF6+Cl2 plasma by statistacl experiment method in this paper.
在相同的输出功率和压力的条件下,将Si和SiNx的刻蚀速率和选择比表示为SF6百分比含量的函数。
More often, all of the materials exposed to the etchant have a finite etch rate.
通常，所有暴露在刻蚀剂中的材料都具有一定的刻蚀速率。
Shallow Etching Rate and Roughness of Etched SiC Surfaces
SiC材料的低速率浅刻蚀工艺研究
etchings, woodcuts, lithographs;
蚀刻、木刻、平版画；
EFFECT OF INTERNAL PRESSURE AND LOCALIZED CORROSION ON PIPELINE CORROSION RATE
局部腐蚀条件下内压对管道腐蚀速率的影响
The resolution of an etching process is a measure of the fidelity of pattern transfer.
刻蚀工艺的分辨率是图形转移保真度的量度。
Research on Frequency Trimming of Quartz Crystal Resonators by Laser Etching;
石英晶振器件的激光刻蚀频率微调研究
ESC’s Influence to Production in Poly Etch and Methods to Improve ESC’s Lifetime
干法刻蚀中静电吸盘对产品良率的影响
Standard of test method for corrosion rate of buried steel
埋地钢质检查片腐蚀速率测试方法
10.6 The corrosion data must below 0.075 mm/year.
腐蚀速率必须低于0.075密尔/年。
Determination of Limestone Erosion Rate with ～(36)Cl AMS Measurement;
AMS测定～(36)Cl研究灰岩的侵蚀速率
Research on Concrete Resistivity and Reiforced Concrete Steel Corrosion Rate
混凝土电阻率及钢筋腐蚀速度的研究
Measurements and Analyses of the Corrosive Rates of X52 Pipeline Material in Soil
X52管材土壤腐蚀速率测试及结果分析
Semi-empirical Model for Prediction of CO_2 Corrosion Rate
CO_2腐蚀速率半经验预测模型研究
The potgtodynamic scanning method can determine the corrosion rate and screened inhibitor quickly, and simply.
应用动电势扫描法能够快速、便地测定腐蚀速率和评选缓蚀剂。
The cooling rate and denudation rate decreased overall from north to south.
总体上自北而南,剥蚀速率和冷却速率均逐渐变小。
gas discharge etching
气体放电蚀刻[法]
laser engraving, laser etching
激光雕刻，激光蚀刻
a block that has been etched or engraved.
一块被蚀刻或雕刻的板。
