The influences of the three non-ideal factors on the grazing specular reflectivity of non-ideal soft X-ray optical multilayers were calculated by using dynamic optical theory.
基于动力学光学理论,计算了上述非理想因素对软X射线光学多层膜的掠入射镜向反射率的影响结果表明:层厚的随机漂移使反射率、尤其是高级反射率降低;累积层厚漂移破坏了多层膜的长程有序性,使反射峰展宽;界面扩散和界面粗糙度使反射率降低,对高级反射率的影响更甚,但二者并不破坏多层膜的长程有序性,所以反射峰的宽度不变;界面扩散和界面粗糙度对反射率影响的机制不同;在界面扩散宽度和界面粗糙度相等的情况下,界面粗糙度使反射率下降显著。
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