The deposition of diamond-like carbon films produced by radio frequency glow discharge of hydrocarbon gas was studied,and the effects of radio frequency voltage and deposition time on the thickness and the Vickers microhardness of films were investigated.
研究了碳氢气体通过射频辉光放电沉积类金刚石碳膜。
Plasma chemical vapor deposition in silane radio frequency glow discharge is a main fabrication technology of hydrogenated amorphous silicon(a-Si:H)films.
射频辉光放电硅烷等离子体化学汽相沉积是制备氢化非晶硅薄膜的主要工艺技术。
This paper reports that a heated and tuned Langmuir probe has been used on the measurement of the electron energy distribution function f(E), the mean electron energy and the electron concentration in radio frequency glow discharge plasma, and gives a systemic analysis about the effect of the technology parameters on the electron character in plasma space.
本文采用加热的调谐单探针研究了射频辉光放电等离子体空间电子能量分布函数,电子平均能量和电子密度,并系统地分析了各工艺参量对于等离子体空间电子特性的影响。
The crystal growth by glow discharge sputterings and ion beam sputterings and thecrystal epitaxy are introduced.
介绍了气相中晶体生长的方法,如辉光放电溅射法和离子束溅射沉积法以及晶体外延生长的方法。
Optical emissiom spectra of SiH 4 rf glow discharge were measured by OMA-4000.
采用OMA - 4 0 0 0测量了SiH4射频辉光放电等离子体的光发射谱 ,研究了其谱线强度随放电射频功率和反应气体流量间的变化关系。
c-Si∶H/a-Si∶H multilayers have been prepared with RF glow-discharge method in which two types of coupling electrodes are alternately changed periodically.
利用射频辉光放电法 ,通过周期性交替切换两种耦合电极的方式 ,制备了 μc- Si∶ H/a- Si∶ H多层膜 。
Analytical performance of glow discharge optical emission spectrometry with neon-argon mixed gases in determination of aluminum in steel samples;
氖氩混合气体辉光放电发射光谱法测定钢样中铝的分析特性(英文)
Design and Investigation of Capacitive Coupling Radio Frequency Glow Discharge Source;
电容耦合射频辉光放电等离子体激发源研制
Two-dimensional PIC/MC Simulation of a Capacitively Coupled RF Glow Discharge in Nitrogen;
氮气电容耦合射频辉光放电二维PIC/MC模拟研究
Recent Progress of Atmospheric-Pressure Glow Discharges with Bare-Metallic Electrodes
裸露金属电极大气压射频辉光放电研究进展
The Measurement in SiCl_4/H_2 rf Glow Discharge Using Langmuir Probe;
射频辉光放电SiCl_4/H_2等离子体的探针诊断
Probe Study of Space Characteristics of Plasma in Radio Frequency Glow Discharge;
射频辉光放电等离子体空间特性的探针研究
Mass Spectroscopic Diagnosis of Plasma Space Properties in Radio Frequency Glow Discharge;
射频辉光放电等离子体空间特性的质谱诊断
Studies of P-Si0_2 and P-SiON Films Deposition with TEOS by RF Glow Discharge;
TEOS射频辉光放电分解淀积P-SiO_2和P-SiON薄膜的研究
Fluid Simulation of Mode Transition Characteristicses of Atmospheric Pressure Radio Frequency Glow Discharge
大气压射频辉光放电模式转换机制的流体力学模拟
Radiofrequency glow discharge time of flight mass spectrometry for thin films analysis:pulsed mode versus continuous mode
射频辉光放电飞行时间质谱法分析薄膜:脉冲模式与连续模式的比较
Preparation technique and performances characterization of diamond-like carbon films by RFGDPECVD method
射频辉光放电等离子体辅助化学气相沉积法制备类金刚石碳膜工艺与性能表征
Numerical Simulation of Ar/SiH_4/H_2 RF Glow Discharge at Atmospheric Pressure
大气压射频Ar/SiH_4/H_2辉光放电数值模拟
Study of PET Fiber Surface Modification by Radio Frequency Atmospheric Pressure Dielectric Barrier Glow Discharge;
射频常压介质阻挡辉光放电等离子体表面改性PET纤维的研究
Application of Glow Discharge Optical Emission Spectrometer to Material Analysis
辉光放电发射光谱法在材料分析中的应用
power grid-glow tube
强信号栅控辉光放电管
hot-cathode grid glow tube
热阴极栅控辉光放电管
high-voltage glow-discharge ion source
高压辉光放电离子源
glow discharge lubricant
辉光放电合成润滑剂
Does the fluorescent lamp discharge in the form of glow or arc
日光灯气体放电是辉光放电还是弧光放电
