Process window improvement is presented due to off-axis illumination(OAI) and phase-shifting mask(PSM) for 193 nm immersion lithography at 65 nm node.
研究了交替型相移掩模及离轴照明对65nm分辨率ArF浸没式光刻的影响。
Immersion lithography improves critical dimension uniformity (CDU) as well as avoiding the necessity for strong resolution enhancement techniques (RET) as compared with dry lithography.
通过比较干法和浸没光刻技术在超越焦深(DOF)提高方面的一些主要特点,举例说明了采用浸没式光刻技术的许多优势。
The principle of immersion lithography is analyzed,several fundamental issues of immersion lithography are discussed,and development status of the immersion lithographic tools is described.
浸没式光刻技术是将某种液体充满投影物镜最后一个透镜的下表面与硅片之间来增加系统的数值孔径,可以将193nm光刻延伸到45nm节点以下。
Most Recent Development of Immersion ArF Lithography;
浸没式ArF光刻最新进展
Study of ArF Immersion Lithography and Development of Optical Lithography Simulator;
ArF浸没式光刻技术研究及光刻仿真辅助设计软件开发
die-casting machine with submerged gooseneck
浸没式鹅颈管压铸机
immersion darkfield condenser
浸液式暗视野聚光器
direct write electron beam system
直写式电子束光刻装置
fully-flooded high temperature jet-dyeing machine
全浸没式高温喷射染色机
single drum dryer with dip-feed
浸没布料式单滚筒干燥器
submerged tube forced circulation evaporator
浸没管式强制循环蒸发器
double drum dryer with dip-feed
浸没加料式双滚筒干燥器
A Comparative Study: Immersion Bilingual Education in Canada and Submersion Bilingual Education in the U. S.;
加拿大沉浸式双语教育与美国淹没式双语教育
PHENOL WASTEWATER TREATMENT WITH SUBMERGED TUBULAR MEMBRANE MBR
浸没式管式膜MBR处理含酚废水的工艺条件
Study of the Technologies of High-density Optical Data Storage with Short-wavelength Laser Source and Solid Immersion Lens;
短波长与固体浸没透镜高密度光存储技术研究
Study of the High Density Optical Data Storage Using Solid Immersion Lens;
应用固体浸没透镜的高密度光数据存储研究
Simulation Study of the Confined-Flow Multi-lenses Multi-beam Electron-Optical System
浸没流多透镜多注电子光学系统的模拟研究
Research and Development on the Open Worktable Control System for Immersion Device;
浸没装置开放式平台控制系统的研究与开发
Pilot Study of Luanhe River Water Treatment by an Immersed Hollow-fiber Microfiltration Membrane System;
浸没式中空微滤膜处理滦河原水的中试研究
The Application of Immersion Combined Membrane Process for Drinking Water Treatment;
浸没式膜组合工艺在饮用水处理中的应用研究
Study on the Operating Characteristic of Submerged Membrane Bioreactor
浸没式膜—生物反应器运行特性试验研究
Pilot-scale Test on Drinking Water Treatment by Immersed Ultrafiltration Hybrid Process
浸没式超滤技术用于饮用水处理的中试研究
