With the rapid development in the process of intenrated circuits, the function of the process simulation software has been improved constantly, Taking The oxidation and diffusion process as example, The edit of process initial condition and oxygen chemical diffusion process simulation are done on the computer.
随着集成电路工艺的不断发展,工艺模拟软件功能也在不断的改善,本文以氧化扩散工艺为例,并在计算机上采用SUPREM-Ⅲ完成氧化扩散初始条件的编辑以及工艺模拟,并对模拟结果进行分析比较。
Electrical conductivity relaxation method was used to determine the oxygen chemical diffusion coefficients Dchem.
8)钙钛矿型氧化物系列样品,采用电导弛豫法研究了LPSCN样品的氧化学扩散系数。
An Improved Method for Precise Temperature Control of Diffusion/Oxidation Furnace
一种提高扩散氧化炉温度控制精度的方法
passive diffusion tube for detecting nitrogen dioxide
检测二氧化氮的静态扩散管
vertical double diffused mos
垂直双扩散金属氧化物半导体结构
double diffused mos transistor
双扩散金属氧化物半导体晶体管
double diffused MOS integrated circuit
双扩散金属-氧化物-半导体集成电路
Diffusion and Oxidation Wear Research of PCD Tools Based on Thermodynamics
基于热力学的PCD刀具扩散与氧化磨损
The Diffusion Activation Energy and Electric Conductivity of Oxygen Ion of Oxide Nano-ceramic
氧化物纳米陶瓷中氧离子扩散激活能和电导率
The Application of Gas Diffusion Electrode on Photoelectrocatalysis Oxidation Phenol in Water;
气体扩散电极在光电催化氧化水中苯酚的应用
Molecular Simulation of Adsorption and Diffusion in Epoxidation of Propylene by Catalysts;
丙烯催化环氧化反应吸附扩散的分子模拟研究
Two-dimensional theoretical model for diffusional CW oxygen-iodine chemical lasers
连续波扩散型氧-碘传能化学激光器模型
Study on the High Temperature Oxidation Resistance and Carbonization Resistance of Diffusion Aluminized Stainless Steel;
扩散渗铝不锈钢的抗高温氧化和抗渗碳性研究
Irradiation-enhanced Diffusion Effects of Amorphous Silicon Dioxide;
非晶态二氧化硅的辐照增强扩散效应研究
Design of Micro-control Diffusion/Oxidation System for Solar Cell Production
用于太阳能电池生产的微控扩散/氧化系统设计
Study on Surface Structure of Scandia Mixed Tungsten Matrix Impregnated Dispenser Cathode
氧化钪混合钨基扩散型阴极表面结构的研究
Evaluating the Diffusion Coefficient of Different Epoxy Resins with EIS
利用电化学技术测试不同环氧涂层的扩散系数
Development of Semiconductor Diffusion/Oxidize Control System of Craft Based on Modbus
基于Modbus的半导体扩散/氧化工艺控制系统
The oxygen reduction performance of CoPc/C catalyst and gas diffusion electrode
CoPc/C催化剂及气体扩散电极的氧还原性能
Optimization Technological Parameters for Hot Dip Aluminizing and Diffusion Aluminizing and High Temperature Oxidation Properties on Surface of Carbon Steel
碳钢热浸扩散渗铝工艺及高温氧化性能的研究
