The fidelity pattern transfer of mask and substrate were analyzed with the etching depth.
给出了离子能量、离子束流密度和离子束入射角等因素与刻蚀速率的关系曲线,用最小二乘法拟合了上述因素与刻蚀斜率的函数关系方程;分析了光刻胶和基片在刻蚀过程中随刻蚀深度的变化对图形转移精度的影响,用AFM的Tapping模式测量了刻蚀前后HfO2薄膜表面质量的变化。
In the thesis, the method and principle of getting electro deposition (ED) photoresist has been introduced, together with the technology of pattern transfer.
随着高密度互连(HDI)技术的发展,IC封装密度的提高,高解析度(分辨率)、均一性良好的超薄感光抗蚀膜成为必然需求,文中介绍了电沉积技术(ED)成膜的方法、原理以及相应的图形转移技术,并与传统干膜、旋涂成膜工艺进行对比,结果表明ED膜具有良好的粘附力、很高解析度以及精确的图形精度。
The factors which affict the pattern transfer process are discussed.
用二次阳极氧化方法制备出分立、双向贯通并且超薄(500—1000 nm)的多孔阳极氧化铝膜,贴合到硅片上进行干法刻蚀,实现图形转移,得到了硅基纳米孔阵列结构,并对工艺中影响图形转移质量的因素进行了探索。
The program is programmed not only by ladder chart but also by sequential function chart, thus significantly improving the pro-grammability, adjustability and readabilit.
由于该系统工艺的复杂性、特殊性,在控制软件的编制上并没有统一采用梯形图编程法,而是采用梯形图编程法与状态转移图编程法相结合的方法,这样大大提高了软件的可编性、可调性、可读性。
It resolved the low efficacy and poor quality of the traditional manual control binding machine,the design scheme of the control system was reasonable and easy to achieve,program design used the sequential function chart and adapt to the complex process flow.
它解决了传统手控装订机在书刊装订中功效低、质量差的问题;控制系统设计方案合理且易实现;程序设计采用可读性强的状态转移图法,非常适合复杂工艺流程。
The analysis of State Transition Graph (STG) topology reveals that it is possible to design a serial feedback-based BIST structure yielding STGs of disjunct rings only.
本文给出一种串行反馈内置自测试设计结构，分析了它的状态转移图的拓扑结构，并对若干电路做了模拟实验。
charge transfer image sensor
电荷转移图像传感器
The Illustration of Power-Transferring Diagram of T-Type Nonlinear Resistance Network;
T型非线性电阻网络功率转移图的图解法
Study of several critical issues in image synthesis based on pixel transferring;
基于象素点转移图象合成的若干关键技术研究
In figure 14-25 the objective is to transfer the neck dart into the waist dart. Figure 14-26 shows the shoulder dart pivoted to its new site.
图14-25的目的是把领省转移为腰
The company is trying to dispel rumours about a take-over.
公司力图澄清有关控制权转移的流言.
Study on Theoretical Model and Faculty Evaluation of Library Knowledge Transfer;
图书馆知识转移理论模型及测评研究
Library Knowledge Transfer Mechanism and Effect Researching;
图书馆知识转移的机制及其效度研究
Study on the Effect Factors Modeling of Library Knowledge Transfer
图书馆知识转移影响因素的建模研究
Imaging features of ~(18)F-FDG PET/CT in patients with brain metastases
脑转移瘤的~(18)F-FDG PET/CT图像特点
Research on Library Knowledge Transfer Model under Network Environment
网络环境下图书馆知识转移模式研究
Analysis on the Knowledge Transfer Model in Library and Its Influencing Factors
图书馆知识转移模型及影响因素分析
Analysis of the impact factors of knowledge transference in libraries
图书馆知识转移的影响因素分析研究
Analysis of bone metastases in lung cancer patients with ~(18)F-FDG PET/CT
肺癌骨转移病灶~(18)F-FDG PET/CT图像分析
Knowledge Transfer Model Based on Internal Library
基于图书馆内部知识转移模式的探讨
From "Final Drawings" to "Draft Drawings" : Shift of Architecture Design Teaching and Grading
从“正图”到“草图”——建筑设计教学和评价的重心转移
In figure 14-19 the objective is to pivot the neck dart to a site below the underarm point.
图14-19的目的是把领省转移到腋下位置。
The resolution of an etching process is a measure of the fidelity of pattern transfer.
刻蚀工艺的分辨率是图形转移保真度的量度。
Even the hilar nodes in this photograph demonstrate nodules of metastatic carcinoma.
甚至图示的肺门的结节也是转移癌的结节。
