A small linear encoder with nanometer resolution is integrated in the PZT actuator for measuring the displacement of the PZT actuator.
该探针结构包括一个硅悬臂梁和一个环形的预压型压电(PZT)执行器,执行器沿Z轴的行程为70μm,其内部集成了一个具有纳米级分辨率的小型线性编码器,可用于测量PZT执行器的位移。
Algorithm in image recognition for coded level ruler of digital levels;
数字水准仪编码标尺图像识别算法
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