Anovelbackside contact dual pH-ISFET structure withitsmicroreferenceelectrode which can be completely isolated from other senSitive elemcntsand signalconditioning circuits is presented in this paper.
报道了一种含微参比电极的差分结构,并可与其它敏感元和信号处理电路完全隔离的背面引线氢离子敏感场效应(pH-ISFET)新结构。