A new way of using reactive ion etch and plasma etch to make sharptips for vacuum pressure sensor is presented in this paper.
主要介绍利用反应离子腐蚀和等离子腐蚀相结合的方法制作真空微电子压力传感器中锥尖阵列。
RIE and the Application in the VLSI Failure Analysis Field;
反应离子腐蚀及其在VLSI失效分析中的应用
barrel reactor plasma etching
圆筒形反应期等离子腐蚀
Electrochemical corrosion behavior of reactive plasma-sprayed TiN coatings
反应等离子喷涂TiN涂层电化学腐蚀行为
multiwafer plasma reactor
多圆片等离子体反应器
planar plasma reactor
平面式等离子体腐蚀器
radical plasma etching
自由基等离子体腐蚀
Behaviour of Ar~+ Ion in Reactive Ion Etching of Ⅲ-Ⅴ Compound
氩离子在反应离子腐蚀Ⅲ-Ⅴ族材料中的作用
radial flow plasma etching reactor
径向两等离子体腐蚀装置
parallel plate plasma etcher
平行板等离子体腐蚀装置
Fractal Behavior and Elliptic Flow Effect in Heavy Ion Reactions
重离子反应中的分形行为和椭圆流效应
The failure of the hollow cylinder roller bearing is stress corrosion wearing.
空心圆柱滚子轴承为应力腐蚀磨损失效。
Study on Corrosion and Structure about the Reacting Kettle's Inner Vessel and Its Appurtenace of Producing Nitric Acid Using Direct Method;
直硝法生产浓硝酸反应釜内筒及附件的腐蚀和结构的研究
Corrosion resistance of Al/Al_2O_3 coating prepared by plasma spraying on magnesium alloy
镁合金等离子喷涂Al/Al_2O_3涂层的耐腐蚀性能
Hot Corrorion Behavior of the Air Plasma Spraying Yttria-stabilized Zirconia Coating
等离子喷涂YSZ热障涂层的热腐蚀行为研究
Anticorrosion Properties of Pure Titanium by Means of Plasma Nitriding Technique
等离子渗氮对纯钛耐腐蚀性能影响的研究
cylindrical grate ball mill
格子式圆筒形球磨机
Beer cans are cylindrical.
啤酒罐子是圆筒形的。
Inductively coupled plasma reactive ion etching of InSb photovoltaic detector arrays
InSb阵列探测芯片的感应耦合等离子反应刻蚀研究
magnetron ion etcher
磁控管离子腐蚀装置
