The effects of line magnetic filtering on the particles density and size in TiN and TiAlN films deposited by using arc ion plating have been examined by SEM.
用扫描电镜对比分析了电弧离子镀增加直线磁场过滤对沉积TiN和TiAlN薄膜中颗粒的密度和尺寸的影响。
With this modified vacuum arc deposition apparatus, the effects of filter duct magnetic field on cathodic arc discharge and plasma transport are studied.
在此情况下对磁过滤管道磁场对MEVVA源阳极 阴极以及磁过滤管道 阴极 2个回路弧放电以及磁过滤管道等离子体传输效率的影响进行了实验研究 。
